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Integrated Circuit Fabrication Science and Technology

Authors

James D. Plummer
, Stanford University, California,
Peter B. Griffin
, Stanford University, California
Published 2023

Description

Master fundamental technologies for modern semiconductor integrated circuits with this definitive textbook. It includes an early introduction of a state-of-the-art CMOS process flow, exposes students to big-picture thinking from the outset, and encourages a practical integration mindset. Extensive use of process and TCAD simulation, using industry tools such as Silvaco Athena and Victory Process, provides students with deeper insight into physical principles, and prepares them for applying these tools in a real-world setting. Accessible framing assumes only a basic background…

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Key features

  • An up-to-date guide to the science and technology of fabricating modern semiconductor ICs, applicable to silicon, compound semiconductor and MEMS devices that ensures students fully understand the field today
  • Covers cutting-edge industry-standard technologies, which prepares students for a smooth transition to careers in industry
  • Introduces and describes a complete, state-of-the-art CMOS process flow early in the book, which provides students with an immediate overview and broad context to clearly understand technologies introduced in later chapters

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