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Wet and Dry Etching of InGaP

Published online by Cambridge University Press:  26 February 2011

J. R. Lothian ,
J. M. Kuo ,
S. J. Pearton  and
F. Ren
J. R. Lothian
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974
J. M. Kuo
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974
S. J. Pearton
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974
F. Ren
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974
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Abstract

The wet chemical etching rates of InGaP in H3 PO4:HCL:H2O mixtures have been systematically measured as a function of etch formulation and are most rapid (-1 μm · min−1) for high HCl compositions. The etch rate, R, in a 1:1:1 mixture is thermally activated of the form R ∝ e−Ea/kT, where Ea = 11.25 kCal · mole−1. This is consistent with the etching being reaction-limited at the surface. This etch mixture is selective for InGaP over GaAs. For chlorine-based dry etch mixtures (PCl3 /Ar or CCl2 F2 /Ar) the etching rate of InGaP increases linearly with DC self-bias on the sample, whereas CH4/H2-based mixtures produce slower etch rates. Selectivities of ≥500 for etching GaAs over InGaP are obtained under low bias conditions with PCl3/Ar, but the surface morphologies of InGaP are rough. Both CCl2F2/Ar and CH4/H2/Ar mixtures produce smooth surface morphologies and good (>10) selectivities for etching GaAs over InGaP.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 240: Symposium E – Advanced III-V Compound Semiconductor Growth, Processing and Devices , 1991 , 307
Copyright
Copyright © Materials Research Society 1992

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References

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