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Target Surface Modification and Particulates on YBa2Cu3O7−x Thin Film by Pulsed Laser Deposition
Published online by Cambridge University Press: 26 February 2011
Abstract
The modifications of the laser ablated target surface morphology and the particulates on YBa2Cu3O7−x (YBCO) thin films have been investigated. As the number of laser pulse per site increases, the ablated target surface changes to conical structures. After the texturing of the target surface, the ablated surface morphology changed identically, independent of the initial surface roughness of the polished targets. The YBCO thin films deposited using the stationary target have an almost particulate-free surface. However, in the case of the YBCO films deposited using the rotating target, there is a considerable increase in the density of particulates on the film surface.
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- Copyright © Materials Research Society 1992