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Stability and Nanostrucure of Heterogeneous Amorphous Silicon Thin-Film Synthesized Under High Chamber Pressure (500 To 2200 Mtorr) Regime of Rf Pecvda

Published online by Cambridge University Press:  17 March 2011

A. R. Middya ,
S. Hamma ,
S. Hazra ,
S. Ray  and
C. Longeaud
A. R. Middya
Affiliation:
Laboratoire de Physique des Interfaces et des Couches Minces (UMR 7647 CNRS), Ecole Polytechnique, 91128 Palaiseau, Cedex, FRANCE Energy Research Unit, Indian Association for the Cultivation of Science, Jadavpur, Calcutta - 70 032, INDIA
S. Hamma
Affiliation:
Laboratoire de Physique des Interfaces et des Couches Minces (UMR 7647 CNRS), Ecole Polytechnique, 91128 Palaiseau, Cedex, FRANCE
S. Hazra
Affiliation:
Energy Research Unit, Indian Association for the Cultivation of Science, Jadavpur, Calcutta - 70 032, INDIA
S. Ray
Affiliation:
Energy Research Unit, Indian Association for the Cultivation of Science, Jadavpur, Calcutta - 70 032, INDIA
C. Longeaud
Affiliation:
Laboratoire de Genie Electrique de Paris (CNRS, URA 0127), Ecole Superieure d'Electricite, Universites Paris VI et Paris XI, Plateau de Moulon 91192 Gif-Sur-Yvette, Cedex, FRANCE
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Abstract

We report on improvement in stability of a new type of amorphous silicon films, synthesized (growth rate > 0.1 nm/s) by driving the plasma condition close to the powder regime (or “γ-regime”) of rf PECVD. These films exhibit high mobility-lifetime products [(μτ)annld ∼ 10−4 cm2/V, σph/σd ∼ 5-10×105, Ea ≍ 0.7 - 0.9 eV ], compact network structure [CH ≍ 7 to 8 at%, nanovoid density < 0.01 %, ρ ≍ 2.23 ± 0.01 gm/cm3], new features of optical properties and density-of-state (DOS) above EF is significantly lower than that of state-of-the art films. The kinetics of light-induced (AM 1.5) degradation of μτ is very fast and saturated μτ ∼ 10−6cm2/V, a value similar to that of conventional a-Si:H films at annealed state. The improved stability of “new” a-Si films, henceforth it will be denoted as “quasi-amorphous silicon (qm-Si) thin- film”, will be correlated with its specific nanostructure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 664: Symposium A – Amorphous and Heterogeneous Silicon-Based Films-2001 , 2001 , A9.5
Copyright
Copyright © Materials Research Society 2001

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References

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