Hostname: page-component-6bf8c574d5-8gtf8 Total loading time: 0 Render date: 2025-02-15T09:33:20.551Z Has data issue: false hasContentIssue false
  • English
  • Français

Selective laser melting of high aspect ratio 3D nickel – titanium structures for MEMS applications

Published online by Cambridge University Press:  01 February 2011

Paul Chalker ,
Adam Clare ,
Sean Davies ,
Christopher J. Sutcliffe  and
Sozon Tsopanos
Paul Chalker
Affiliation:
pchalker@liv.ac.uk, University of Liverpool, Engineering, Brownlow Hill, Liverpool, Merseyside, L69 3GH, United Kingdom, 0151 794 4313, 0151 794 4675
Adam Clare
Affiliation:
A.T.Clare@liv.ac.uk
Sean Davies
Affiliation:
S.Davies01@liverpool.ac.uk
Christopher J. Sutcliffe
Affiliation:
C.Sutcliffe@liverpool.ac.uk
Sozon Tsopanos
Affiliation:
sozos@liverpool.ac.uk
Get access

Abstract

Selective laser melting has been used to build high aspect ratio, three-dimensional NiTi components for the first time. The influence of laser dwell time and raster pitch on the density of NiTi shape memory alloy parts and their resolvable feature sizes are reported. The properties of shape memory springs produced by this method are reported and the application of selective laser melted NiTi components in microelectromechanical devices is discussed.

Keywords

laser annealingmicroelectro-mechanical (MEMS)scanning electron microscopy (SEM)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 890: Symposium Y – Surface Engineering for Manufacturing Applications , 2005 , 0890-Y03-02
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Madou, M.J., Chapter 6 in “Fundamentals of Microfabrication”, CRC Press, Boca Raton, FL., 1997 Google Scholar
[2] Li, Xiaochun, Hongseok, Choi, Yang, Yong, “Micro rapid prototyping system for micro components” Thin Solid Films 420–421 (2002) 515 Google Scholar
[3] Morgan, R., Sutcliffe, C‥J, O'Neill, W., “Density analysis of direct metal laser re-melted 316L stainless steel cubic primitives”, Journal of Materials Science 39(4) (2004) 1195 Google Scholar
[4] Tsopanos, S., Sutcliffe, C. J. and Owen, I., Proc. Fifth Int. Conf. on Enhanced, Compact and Ultra-Compact Heat Exchangers: Science, Engineering and Technology, CHE 2005 Google Scholar
[5] Agarwala, M., Bourell, D., Beaman, J., Marcus, H., and Barlow, J., Rapid Prototyping 1, (1995) 26 Google Scholar
[6] Beaman, J. J., Barlow, J. W., Bourell, D. L., Crawford, R.H., Marcus, H. L. and Mcalea, K. P., “Solid Freeform Fabrication: A New Direction in Manufacturing”, Kluwer Academic Publishers, 1997 Google Scholar
[7] Lu, L., Fuh, J. and Wong, Y. S., Laser-Induced Materials and processes for Rapid Prototyping, Kluwer Academic Publishers, 2001 Google Scholar
[8] Fu, Y., Du, H., Huang, W., Zhang, S., Hu, M., Sensors and Actuators A 112 (2004) 395 Google Scholar
[9] Eggeler, G., Khalil-Allafi, J., Gollerthan, S., Somsen, C., Schmahl, W. and Sheptyakov, D., Smart Mater. Struct. 14 (2005) S186 Google Scholar
[10] Miyazaki, S. and Ishida, A., Mater. Sci. Eng. A273–A275 (1999) 106 Google Scholar