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Preparation and characterization of SiO2/Au nanocomposites by R.F. Sputtering

Published online by Cambridge University Press:  10 February 2011

Shinya Terauchi ,
Hiroyuki Umehara ,
Naoto Koshizaki  and
Takeshi Sasaki
Shinya Terauchi
Affiliation:
National Institute of Materials and Chemical Research(NIMC), Agency of Industrial Science and Technology, MITI,1-1 Higashi, Tsukuba, lbaraki 305, Japan.
Hiroyuki Umehara
Affiliation:
National Institute of Materials and Chemical Research(NIMC), Agency of Industrial Science and Technology, MITI,1-1 Higashi, Tsukuba, lbaraki 305, Japan.
Naoto Koshizaki
Affiliation:
National Institute of Materials and Chemical Research(NIMC), Agency of Industrial Science and Technology, MITI,1-1 Higashi, Tsukuba, lbaraki 305, Japan.
Takeshi Sasaki
Affiliation:
National Institute of Materials and Chemical Research(NIMC), Agency of Industrial Science and Technology, MITI,1-1 Higashi, Tsukuba, lbaraki 305, Japan.
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Abstract

We fabricated SiO2/Au nanocomposites using alternate sputtering method. The size of the Au particles seem was unchanged by the SiO2 sputtering and well controllable by the sputtering parameters. The nanoparticles in SiO2 were observed by TEM and the nanocomposites were characterized using XPS technique. TEM observation revealed the size of Au nanoparticles to be 2–15 nm. We observed a chemical shift of the Au4f peak in the XPS study. We demonstrate the efficiency of the technique for controlling the size and quantity of nanoparticles dispersed in nanocomposites.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 501: Symposium FF – Surface Controlled Nanoscale Materials for High-Added… , 1997 , 185
Copyright
Copyright © Materials Research Society 1998

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References

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