Hostname: page-component-6bf8c574d5-956mj Total loading time: 0 Render date: 2025-02-14T22:38:06.096Z Has data issue: false hasContentIssue false
  • English
  • Français

Meeting RTP Temperature Accuracy Requirements: Measurement and Calibrations at Nist

Published online by Cambridge University Press:  10 February 2011

F. J. Lovas ,
B. K. Tsai  and
C. E. Gibson
F. J. Lovas
Affiliation:
Optical Technology Division, National Institute of Standards and Technology, Gaithersburg MD 20899, lovas@tiber.nist.gov
B. K. Tsai
Affiliation:
Optical Technology Division, National Institute of Standards and Technology, Gaithersburg MD 20899
C. E. Gibson
Affiliation:
Optical Technology Division, National Institute of Standards and Technology, Gaithersburg MD 20899
Get access

Abstract

Although radiometric temperature measurement in rapid thermal processing (RTP) tools has substantially improved in terms of repeatability and uniformity, it still remains a technical challenge. The 1999 requirements of 180 nm line width technology in the 1997 National Technology Roadmap for Semiconductors (NTRS) imply an uncertainty of ± 2 °C in temperature measurement, which will continue the challenge in temperature measurement. In this paper we will discuss the NIST absolute radiometric temperature calibration, measurements, and uncertainty analysis.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 525: Symposium W – Rapid Thermal & Integrated Processing VII , 1998 , 127
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Kreider, K.G., DeWitt, D.P., Tsai, B.K., Lovas, F.J., Burns, G.W., and Allen, D.W., Mater. Res. Soc. Proc., present volume.Google Scholar
2. DeWitt, D.P., Sorrell, F.Y., and Elliott, J.K., Mater. Res. Soc. Proc. V 470, 3–15 (1997).Google Scholar
3. Preston-Thomas, H., Metrologia, 27, 3–10, 107 (1990).Google Scholar
4. Mielenz, K.D., Saunders, R.D., Parr, A.C., and Hsia, J.J, J. Res. NIST 95, 621 (1990).Google Scholar
5. Taylor, B.N. and Kuyatt, C.E., NIST Tech. Note 1297 (1994).Google Scholar
6. Gibson, C.E., Tsai, B.K., and Parr, A.C., “NIST Measurement Services: Radiance Temperature Calibrations,” NIST SP250-43 (1998).Google Scholar