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MBE Growth of Compositionally Modulated Ceramics

Published online by Cambridge University Press:  25 February 2011

R. A. Mckee ,
F. A. List  and
F. J. Walker
R. A. Mckee
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831
F. A. List
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831
F. J. Walker
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831
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Abstract

An ultra high vacuum system fitted with thermal effusion cells that heat 20cc of material to temperatures as high as 2000 °C is being used to synthesize thin film and multilayer ceramics from their constituent elements. A molecular source for oxygen used in conjunction with these effusion cells allows oxides of Al, Ti, Cu, and Y to be grown with compositional modulation controlling growth rate and stoichiometry.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 103 , 1987 , 35
Copyright
Copyright © Materials Research Society 1988

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Footnotes

*

Research sponsored jointly by the U.S. Air Force Office of Scientific Research under interagency agreement DOE NO. 40-1514-84, USAF No. AFOSRISSA86-033 and both the Office of Energy Utilization Research, Energy Conversion and Utilization Technologies (ECUT) Program and the Division of Materials Sciences, U.S. Department of Energy, under contract DE-AC05-840R21400 with the Martin Marietta Energy Systems, Inc.

References

REFERENCES

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