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Interface Roughness Determined by Diffuse Scattering and by Reflectivity of Hard X-Rays

Published online by Cambridge University Press:  25 February 2011

B. Lengeler  and
M. Hüppauff
B. Lengeler
Affiliation:
Institut für Schicht- und Ionentechnik, Forschungszentrum Jülich, 5170 Jülich
M. Hüppauff
Affiliation:
Institut für Festkörperforschung, Forschungszentrum Jülich, 5170 Jülich
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Abstract

X-ray reflectivity and diffuse scattering are powerful techniques for the non-destructive determination of the vertical and lateral roughness of external and internal interfaces. The influence of roughness on the reflected and transmitted amplitudes is treated in terms of a model first described by Névot and Croce. The diffuse scattering is described by an improved distorted wave Born approximation. A few examples will demonstrate the possibilities of the techniques.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 280: Symposium B – Evolution of Surface and Thin Film Microstructure , 1992 , 245
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

1. Mandelbrot, B.B., The Fractal Geometry of Nature, W.H. Freeman N.Y. (1982).Google Scholar
2. Feder, J., Fractals, Plenum N.Y. (1988) p. 149 ff.Google Scholar
3. Névot, L., Croce, C., Rev. Phys. Appliquée 15, 761 (1980).CrossRefGoogle Scholar
4. Lengeler, B., “X-ray absorption and reflection in the hard X-ray range” in “Photoemission and Absorption Spectroscopy with Synchrotron Radiation” eds. Campagna, M., Rosei, R., North Holland (1990).Google Scholar
5. Lengeler, B., Adv. in X-ray Analysis 35, 127 (1992).Google Scholar
6. Stanglmeier, F., Lengeler, B., Weber, W., Göbel, H., Schuster, M., Acta Cryst. A 48, 626 (1992).Google Scholar
7. Sinha, S.K., Sirota, E.B., Garof, S., F, , Stanley, H.B., Phys. Rev. B38, 2297 (1988).Google Scholar
8. Weber, W., Lengeler, B., Phys. Rev. B46, 7953 (1992).Google Scholar