Article contents
The Influence of Ion Implantation on The Near-Surface Mechanical Properties of Ceramics
Published online by Cambridge University Press: 16 February 2011
Abstract
Ion implantation of ceramics such as Al2O3 and SiC may produce a highly damaged but crystalline surface layer or an amorphous surface. The specific structure depends upon the implantation parameters. Studies using microindentation techniques show that a crystalline implanted surface has a higher hardness (by 10 to 50%) than the corresponding unimplanted crystal but the elastic modulus is essentially unchanged. The hardness and elastic modulus of amorphous implanted surfaces are less than those of the crystalline material. Estimates of the residual stress have been obtained from microindentation tests.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1990
References
REFERENCES
- 1
- Cited by