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In Situ Observation of an Electrochemical Etching Reaction in Silicon

Published online by Cambridge University Press:  15 February 2011

Frances M. Ross  and
Peter C. Searson
Frances M. Ross
Affiliation:
National Center for Electron Microscopy, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA 94720;, fmross@lbl.gov
Peter C. Searson
Affiliation:
Department of Materials Science and Engineering, The Johns Hopkins University, Baltimore, MD 21218;, searson@jhuvms.hcf.jhu.edu
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Abstract

We describe a TEM specimen holder which has been designed and constructed in order to observe the process of electrochemical pore formation in silicon. The holder incorporates electrical feedthroughs and a sealed reservoir for the electrolyte and it accepts lithographically patterned silicon specimens. We present ex situ observations of progressive pore propagation and show dynamic, in situ observations of electrolyte movement within the pores.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 404: Symposium J – In Situ Electron and Tunneling Microscopy of Dynamic Processes , 1995 , 69
Copyright
Copyright © Materials Research Society 1996

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