Hostname: page-component-6bf8c574d5-rwnhh Total loading time: 0 Render date: 2025-02-15T09:04:37.078Z Has data issue: false hasContentIssue false
  • English
  • Français

High Quality a-Si Films and Superlattice Structure p-Layer a-Si Solar Cells

Published online by Cambridge University Press:  28 February 2011

Shoichi Nakano ,
Shinya Tsuda ,
Hisaki Tarui ,
Tsuyoshi Takahama ,
Hisao Haku ,
Kaneo Watanabe ,
Masato Nishikuni ,
Yoshihiro Hishikawa  and
Yukinori Kuwano
Shoichi Nakano
Affiliation:
Research Center, SANYO Electric Co., Ltd. 1-18-13, Hashiridani, Hirakata City, Osaka, Japan
Shinya Tsuda
Affiliation:
Research Center, SANYO Electric Co., Ltd. 1-18-13, Hashiridani, Hirakata City, Osaka, Japan
Hisaki Tarui
Affiliation:
Research Center, SANYO Electric Co., Ltd. 1-18-13, Hashiridani, Hirakata City, Osaka, Japan
Tsuyoshi Takahama
Affiliation:
Research Center, SANYO Electric Co., Ltd. 1-18-13, Hashiridani, Hirakata City, Osaka, Japan
Hisao Haku
Affiliation:
Research Center, SANYO Electric Co., Ltd. 1-18-13, Hashiridani, Hirakata City, Osaka, Japan
Kaneo Watanabe
Affiliation:
Research Center, SANYO Electric Co., Ltd. 1-18-13, Hashiridani, Hirakata City, Osaka, Japan
Masato Nishikuni
Affiliation:
Research Center, SANYO Electric Co., Ltd. 1-18-13, Hashiridani, Hirakata City, Osaka, Japan
Yoshihiro Hishikawa
Affiliation:
Research Center, SANYO Electric Co., Ltd. 1-18-13, Hashiridani, Hirakata City, Osaka, Japan
Yukinori Kuwano
Affiliation:
Research Center, SANYO Electric Co., Ltd. 1-18-13, Hashiridani, Hirakata City, Osaka, Japan
Get access

Abstract

As a new preparation method for high-quality a-Si films, we have developed the super chamber, a separated UHV reaction chamber system. A low impurity concentration and excellent film properties were obtained by the super chamber. A conversion efficiency of 11.7% was obtained for an a-Si solar cell using a high-quality i-layer deposited by the super chamber, and a p-layer fabricated by a photo-CVD method.

As a new material, amorphous superlattice structure films were fabricated by the photo-CVD method for the first time. Quantization effects and low damage to the interfaces were observed. Superlattice structure p-layer a-Si solar cells were fabricated for the first time, and a conversion efficiency of 10.5% was obtained.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 70: Symposium E – Materials Issues in Amorphous-Semiconductor Technology , 1986 , 511
Copyright
Copyright © Materials Research Society 1986

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

(1) Nakano, S., Kawada, H., Matsuoka, T., Kiyama, S., Sakai, S., Murata, K., Shibuya, H., kishi, Y., Nagaoka, I., Kuwano, Y.: Tech Digest of the Int. PVSEC-1, 583 (1984) Kobe, Japan Google Scholar
(2) Takahama, T., Isomura, M., Tarui, H., Nakashima, Y., Tsuda, S., Nakano, S., Kuwano, Y.: Proc. of the 46th Autumn Meeting of the Jpn. Soc. of Appl. Phys. lp-ZG-4, p. 747 (1985)Google Scholar