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Dry Etching Techniques and Chemistries for III-V Semiconductors

Published online by Cambridge University Press:  25 February 2011

S. J. Pearton
S. J. Pearton*
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974
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Abstract

Dry etching of HI-V materials using both Cl-based (CCl2F2, SiCl4, BCl3, Cl2) and CH4/H2 discharges will be reviewed. The etch rates using chlorine-based mixtures are generally faster than those utilizing CH4/H2, but the latter gives smoother surface morphologies for In-containing compounds. The use of microwave (2.45 GHz) electron cyclotron resonance (ECR) discharges minimizes the depth of lattice disorder resulting from dry etching, relative to conventional RF (13.56 MHz) discharges. Recent results on the systematics of ECR plasma etching of both In- and Ga-based III-V semiconductors using CCl2F2/O2 and CH4/H2 mixtures will be discussed, including the determination of the maximum self-biases allowable which do not induce near-surface damage to the semiconductor. A further key issue is the prevention of changes in the surface stoichiometry of materials such as InP, where the lattice constituents may have considerably different volatilities in the particular discharge.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 216: Symposium T – Long-Wavelength Semiconductor Devices, Materials and Processes , 1990 , 277
Copyright
Copyright © Materials Research Society 1991

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References

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