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Cycling Times of Thin-Film NiTi on Si

Published online by Cambridge University Press:  25 February 2011

A. Peter Jardine
A. Peter Jardine*
Affiliation:
Dept. of Materials Science and Engineering S.U.N.Y. at Stony Brook Stony Brook, NY 11794-2275
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Abstract

The thermo-mechanical properties of NiTi are well known for bulk material although its deposition and utilization as a thin film are still in their earliest stages. The deposition of thin-films of Shape Memory Effect NiTi onto Si(100) wafers offers several advantages over bulk NiTi, including fast response times and comparitively large transformation forces, and so is a promising candidate as a micro-actuator for MicroElectroMechanical (MEMS) systems as well as in strain measurements. The response time for a variety of NiTi layers were modelled under different boundary conditions and show response times similar to the acoustic velocities for one micron thick NiTi.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 246: Symposium M – Shape-Memory Materials and Phenomena--Fundamental Aspects and Applications , 1991 , 427
Copyright
Copyright © Materials Research Society 1992

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References

[1] Jardine, A.P., Ashbee, K.H.G. and Bassett, M., J.Mater. Sci, 21, p. 4273 (1988)Google Scholar
[2] Wang, F. and Beuhler, W.J., Ocean Eng., 1, p. 105 (1968)Google Scholar