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Correlation Between Defects and Electrical Conduction in Surface Conductive Layer of CVD-diamond Films

Published online by Cambridge University Press:  15 February 2011

Y. Show ,
F. Matsuoka ,
S. Ri ,
Y. Akiba ,
T. Kurosu ,
M. Iida  and
T. Izumi
Y. Show
Affiliation:
Dept. of Electronics, Fac. of Engineering, Tokai University 1117 Kitakaname, Hiratsuka, Kanagawa, Japan
F. Matsuoka
Affiliation:
Dept. of Electronics, Fac. of Engineering, Tokai University 1117 Kitakaname, Hiratsuka, Kanagawa, Japan
S. Ri
Affiliation:
Dept. of Electronics, Fac. of Engineering, Tokai University 1117 Kitakaname, Hiratsuka, Kanagawa, Japan
Y. Akiba
Affiliation:
Dept. of Electronics, Fac. of Engineering, Tokai University 1117 Kitakaname, Hiratsuka, Kanagawa, Japan
T. Kurosu
Affiliation:
Dept. of Electronics, Fac. of Engineering, Tokai University 1117 Kitakaname, Hiratsuka, Kanagawa, Japan
M. Iida
Affiliation:
Dept. of Electronics, Fac. of Engineering, Tokai University 1117 Kitakaname, Hiratsuka, Kanagawa, Japan
T. Izumi
Affiliation:
Dept. of Electronics, Fac. of Engineering, Tokai University 1117 Kitakaname, Hiratsuka, Kanagawa, Japan
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Extract

Correlation between defects and electrical conduction in surface conductive layers of CVD diamond films has been studied using electron spin resonance ( ESR ) and two points probe technique methods. The ESR analysis revealed the presence of Pac-center with spin density of 1020 spins/cm3. The Pac-center is composed from two ESR signals: ESR signal from carbon dangling bond with carbon atom neighbors and ESR signal from carbon dangling bond associated with nearest neighbor hole ( hole associated Pac-center ). The hole associated Pac-center is an electrically active defect.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 442: Symposium E – Defects in Electronic Materials II , 1996 , 681
Copyright
Copyright © Materials Research Society 1997

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