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Constant Depth DLTS Measurements on Compound Semiconductors

Published online by Cambridge University Press:  26 February 2011

David Denenberg  and
Austin Blew
David Denenberg
Affiliation:
Lehighton Electronics. Inc., P.O. Box 328, Lehighton, PA 18235
Austin Blew
Affiliation:
Lehighton Electronics. Inc., P.O. Box 328, Lehighton, PA 18235
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Abstract

This paper describes a useful measuring technique enabling Deep Level Transient Spectroscopy [DLTS] on compound semi-conductors. We will report on the methodology of DLTS measurements using newly available software for Miller Feedback Profilers. This method has the advantages of using the constant depth capabilities of the profiler. The combination instrument offers flexibility in limited clean room space.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 240: Symposium E – Advanced III-V Compound Semiconductor Growth, Processing and Devices , 1991 , 239
Copyright
Copyright © Materials Research Society 1992

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References

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