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Compressive Stresses, Buckling and Spalling of Tungsten LPD Films

Published online by Cambridge University Press:  16 February 2011

Aidan Borer  and
Brian Derby
Aidan Borer
Affiliation:
Department of Materials, University of Oxford, Parks Road,Oxford, OX1 3PH, UK.
Brian Derby
Affiliation:
Department of Materials, University of Oxford, Parks Road,Oxford, OX1 3PH, UK.
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Abstract

Very large compressive stresses have been measured in thin LPD tungsten films. These stresses are responsible for the extensive buckling of the films. Buckling occurs over a wide range of radii and is accompanied by random spalling over the same range. The large compressive stresses are thought to be oxidation induced. The pattern of random buckle spalling does not fit the specific spalling criteria proposed by other workers. These criteria are examined and a further explanation for the spalling behaviour of these films proposed

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 188: Symposium K – Thin Films: Stresses and Mechanical Properties II , 1990 , 251
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

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