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A Compact Nuclear Microprobe With a Liquid Metal Ion Source and a Toroidal Analyzer

Published online by Cambridge University Press:  15 February 2011

Mikio Takai ,
Ryou Mimura ,
Hiroshi Sawaragi  and
Ryuso Aihara
Mikio Takai
Affiliation:
Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University, Toyonaka, 560 Osaka, Japan.
Ryou Mimura
Affiliation:
EIKO Engineering Co., Ltd., 50 Yamazaki, Nakaminato, Ibaraki 311-12, Japan.
Hiroshi Sawaragi
Affiliation:
EIKO Engineering Co., Ltd., 50 Yamazaki, Nakaminato, Ibaraki 311-12, Japan.
Ryuso Aihara
Affiliation:
EIKO Engineering Co., Ltd., 50 Yamazaki, Nakaminato, Ibaraki 311-12, Japan.
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Abstract

A nondestructive three-dimensional RBS/channeling analysis system with an atomic resolution has been designed and is being constructed in Osaka University for analysis of nanostructured surfaces and interfaces. An ultra high-vacuum sample-chamber with a threeaxis goniometer and a toroidal electrostatic analyzer for medium energy ion scattering (MEIS) was combined with a short acceleration column for a focused ion beam. A liquid metal ion source (LMIS) for light metal ions such as Li+ or Be+ was mounted on the short column.

A minimum beam spot-size of about 10 nm with a current of 10 pA is estimated by optical property calculation for 200 keV Li+ LMIS. An energy resolution of 4 × 10-3 (AE/E) for the toroidal analyzer gives rise to atomic resolution in RBS spectra for Si and GaAs. This system seems feasible for atomic level analysis of localized crystalline/disorder structures and surfaces.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 295: Symposium W – Atomic-Scale Imaging of Surfaces and Interfaces , 1992 , 201
Copyright
Copyright © Materials Research Society 1993

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References

[1] Watt, F. and Grime, G.W., Principles and Applications of High Energy Ion Microbeams (Adam Hilger, Bristol, 1987)Google Scholar
[2] Grime, G.W. and Watt, F., Nuclear Microprobe Technology and Applications (North-Holland, Amsterdam, 1988): Nucl. Instr. and Methods B30 (1988) 227 – 506Google Scholar
[3] Legge, G.J.F. and Jamieson, D.N., Nuclear Microprobe Technology and Applications (North-Holland, Amsterdam, 1991): Nucl. Instr. and Methods B54 (1991) 1 – 446Google Scholar
[4] Takai, M., Scanning Microscopy 6 (1992) 174 Google Scholar
[5] Takai, M., Intern. J. PIXE 2 (1992) 107 Google Scholar
[6] Munro, E., PhD Thesis, University of Cambridge, 1972 Google Scholar
[7] Wells, O.C., Scanning Electron Microscopy (McGraw-Hill, New York, 1974)Google Scholar
[8] Arimoto, H., Miyauchi, E., and Hashimoto, H., Japan. J. Appl. Phys. 24 (1985) L288 Google Scholar