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Bi-Directional Motion Achieved with a Surface Micromachined Electrothermal MEMS Microengine
Published online by Cambridge University Press: 01 February 2011
Abstract
This research is focused on the design and experimental characterization of an electrothermal microengine that is capable of bi-directional motion. The microengine has been operated to control the position a linear shuttle and rotate a set of gears.
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- Research Article
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- Copyright © Materials Research Society 2004
References
REFERENCES
1.
Ristic, L. (ed.), Sensor Technology and Devices, (Artech House, Norwood, MA, 1994).Google Scholar
2.
Pan, C. and Hsu, W., “An electro-thermally and laterally driven polysilicon microactuator,” J. Micromech. Microeng., 7, 7 (1997).10.1088/0960-1317/7/1/003Google Scholar
3.
Kolesar, E., Ruff, M., Odom, W., Jayachandran, J., McAllister, J., Ko, S., Howard, J., Allen, P., Wilken, J., Boydston, N., Bosch, J. and Wilks, R., in Materials Science of Microelectromechanical Systems (MEMS) Devices V, edited by LaVan, D., Ayon, A., Buchheit, T. and Madou, M. (Mater. Res. Soc. Proc. 741, Warrendale, PA, 2003) pp. 93–98.Google Scholar
4.
MEMSPro® CAD Software Manual, version 4, MEMSCAP Corp., 2055 Gateway Place, Suite #400, San Jose, CA 95110 (Internet WEB address: www.memsrus.com).Google Scholar
5.
Koester, D., Mahedevan, R., Shishkoff, A., and Markus, K., Polysilicon Multi-User MEMS Processes (PolyMUMPS) Introduction and Design Rules, revision 4, MEMSCAP Technology Applications Center, 3021 Cornwallis Road, Research Triangle Park, NC 27709.Google Scholar