Hostname: page-component-6bf8c574d5-h6jzd Total loading time: 0.001 Render date: 2025-02-14T13:15:25.806Z Has data issue: false hasContentIssue false
  • English
  • Français

Fabrication of Perforated Film Nanostructures

Published online by Cambridge University Press:  11 February 2011

A. L. Elias ,
K. D. Harris  and
M. J. Brett
A. L. Elias
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, Canada T6G 2V4, aelias@ualberta.ca
K. D. Harris
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, Canada T6G 2V4, aelias@ualberta.ca
M. J. Brett
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, Canada T6G 2V4, aelias@ualberta.ca
Get access

Abstract

We have demonstrated the fabrication of perforated thin films (PTFs), comprised of thin coatings perforated with unusual pore shapes such as helices or chevrons. PTFs are fabricated using a template of nanohelices or nanochevrons produced using the Glancing Angle Deposition (GLAD) technique. PTFs can be produced by filling GLAD films with a variety of substances, etching back the coating to reveal the tips of the helices or chevrons, and etching out the template film. A process for fabricating nickel PTFs has been developed, and a nickel PTF of helical pores with nominal diameters of 100nm has been produced.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 739: Symposium H – Three-Dimensional Nanoengineered Assemblies , 2002 , H8.5
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Li, A.P, Müller, F. and Gösele, U., Electrochem. Solid-State Lett. 3 (3), 131–134 (2000).Google Scholar
2. Wehrspohn, R.B. and Schilling, J., MRS Bull. 8 (26), 623–625 (2001).Google Scholar
3. Harris, K.D., Westra, K.L., and Brett, M.J. in Nonlithoghraphic and Lithographic Methods of Nanofabrication - From Ultralarge-Scale Integration to Photonics to Molecular Electronics, edited by Merhari, L., Rogers, J.A., Karim, A., Norris, D.J., and Xia, Y., (Mater. Res. Soc. Proc. 636, Boston, MA, 2001) D9.37.1–D9.37.6.Google Scholar
4. Harris, K.D., Sit, J. and Brett, M.J., IEEE Trans. Nanotech. 1 (3), 122–128, (2002).Google Scholar
5. Harris, K.D., Huizinga, A. and Brett, M.J., Electrochem. Solid-State Lett. 5 (11), H27–H29 (2002).Google Scholar
6. Kennedy, S.R., Brett, M.J., Toader, O., and John, S., Nano Lett. 2 (1), 59–62 (2002).Google Scholar
7. Robbie, K. and Brett, M.J., J. Vac. Sci. Technol. A, 15 (3), 1460–1465 (1997).Google Scholar
8. Robbie, K. and Brett, M.J., U.S. Patent No. 5,866,204, (2 February 1999).Google Scholar
9. Robbie, K., Brett, M.J., and Lakhtakia, A., Nature 384, 616 (1996).Google Scholar