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Dopants in LiNbO3: Lattice Site Location, Ion Implantation and Epitaxial Regrowth
Published online by Cambridge University Press: 15 February 2011
Abstract
Ion-beam/channeling data for the lattice location of Ti, Hf, Er and Nd in LiNbO3 and LiNbO3: Mg are presented. These impurities are relevant in relation to waveguide and integrated optics devices. It is shown that co-doping with Mg markedly influences the lattice location observed in LiNbO3. The amorphization and recrystalization process following Hf implantation and annealing are also discussed.
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- Copyright © Materials Research Society 1992
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