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Crystallization Mechanism of Ferroelectric SBT Thin Films

Published online by Cambridge University Press:  10 February 2011

Yuji Ikeda ,
Katsuyuki Hironaka  and
Chiharu Isobe
Yuji Ikeda
Affiliation:
Research Center, Sony Corp., Atsugi, Kanagawa, Japan, yikeda@cma.sony.co.jp
Katsuyuki Hironaka
Affiliation:
Research Center, Sony Corp., Atsugi, Kanagawa, Japan, yikeda@cma.sony.co.jp
Chiharu Isobe
Affiliation:
Research Center, Sony Corp., Atsugi, Kanagawa, Japan, yikeda@cma.sony.co.jp
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Abstrct

We characterize, via selected area electron diffraction and high resolution TEM, the multistage crystallization process by which strontium bismuth tantalate(SBT) thin films are transformed from initial amorphous phase to the fully formed layer-structured perovskite. During the annealing process at 800°C, we found that an intermediate fluorite-like stage is formed after 3min as the SBT precursor crystallizing into the final SBT structure. This new information will be very important for formation and crystallization of ferroelectric SBT films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 493: Symposium U – Ferroelectric Thin Film VI , 1997 , 209
Copyright
Copyright © Materials Research Society 1998

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References

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