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A six-beam high-power KrF excimer laser system with energy of 100 J/23 ns

Published online by Cambridge University Press:  05 August 2002

YUSHENG SHAN ,
NAIYAN WANG ,
JINGLONG MA ,
WEIYI MA ,
DAWEI YANG ,
KUN GONG ,
XIUZHANG TANG ,
XIAOJUN WANG ,
XINGDONG JANG  and
YEZHENG TAO
YUSHENG SHAN
Affiliation:
China Institute of Atomic Energy, P.O. Box 275(7), Beijing 102413, China
NAIYAN WANG
Affiliation:
China Institute of Atomic Energy, P.O. Box 275(7), Beijing 102413, China
JINGLONG MA
Affiliation:
China Institute of Atomic Energy, P.O. Box 275(7), Beijing 102413, China
WEIYI MA
Affiliation:
China Institute of Atomic Energy, P.O. Box 275(7), Beijing 102413, China
DAWEI YANG
Affiliation:
China Institute of Atomic Energy, P.O. Box 275(7), Beijing 102413, China
KUN GONG
Affiliation:
China Institute of Atomic Energy, P.O. Box 275(7), Beijing 102413, China
XIUZHANG TANG
Affiliation:
China Institute of Atomic Energy, P.O. Box 275(7), Beijing 102413, China
XIAOJUN WANG
Affiliation:
China Institute of Atomic Energy, P.O. Box 275(7), Beijing 102413, China
XINGDONG JANG
Affiliation:
China Institute of Atomic Energy, P.O. Box 275(7), Beijing 102413, China
YEZHENG TAO
Affiliation:
China Institute of Atomic Energy, P.O. Box 275(7), Beijing 102413, China
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Abstract

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A six-beam multiplexing master-oscillator-power-amplifier (MOPA) high power KrF excimer laser system has been built at CIAE for fundamental research on laser–plasma interaction. The MOPA system consists of front-end, two-stage KrF amplifiers (preamplifier and main amplifier) pumped by two-side electron beams, an optical angular multiplexing system, a synchronization trigger system, and a controlling-data acquisition system and some diagnostic systems. The total energy of the six-beam output from main amplifier on the target is 100 J/23 ns, the divergence of one beam is 0.2 mrad, the focal spot diameter is 220 μm, and the focal intensity on the target is 1013 W/cm2.

Keywords

KrF laser
Type
Research Article
Information
Laser and Particle Beams , Volume 20 , Issue 1 , January 2002 , pp. 123 - 127
Copyright
© 2002 Cambridge University Press