On the theory of plasma–sheath resonance in a non-uniform plasma

NOBORU TANIZUKA; JOHN E. ALLEN

doi:10.1017/S0022377899007576

Abstract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

Calculations are presented on the phenomenon of plasma–sheath resonance in an inhomogeneous plasma. In certain cases, this resonance coincides with a local resonance occurring in the plasma, the local plasma frequency being equal to the resonant frequency of the entire system. The theory does not describe the mechanism of absorption, but does predict the magnitude of the power involved. Some limitations of the theory are discussed.

Crossref Citations

This article has been cited by the following publications. This list is generated based on data provided by Crossref.

Dyson, Anthony and Allen, John E 2003. Field probe for low-pressure capacitively coupled radio-frequency discharge plasmas. Measurement Science and Technology, Vol. 14, Issue. 1, p. 107.

Allen, J. E. 2004. Some Researches in Plasma Physics. Contributions to Plasma Physics, Vol. 44, Issue. 5-6, p. 371.

Walker, D. N. Fernsler, R. F. Blackwell, D. D. Amatucci, W. E. and Messer, S. J. 2006. On collisionless energy absorption in plasmas: Theory and experiment in spherical geometry. Physics of Plasmas, Vol. 13, Issue. 3,

Czarnetzki, U. Mussenbrock, T. and Brinkmann, R. P. 2006. Self-excitation of the plasma series resonance in radio-frequency discharges: An analytical description. Physics of Plasmas, Vol. 13, Issue. 12,

Mussenbrock, Thomas Ziegler, Dennis and Brinkmann, Ralf Peter 2007. Response to “Comment on ‘A nonlinear global model of a dual frequency capacitive discharge’ ” [Phys. Plasmas 14, 014701 (2007)]. Physics of Plasmas, Vol. 14, Issue. 1,

Huang, Y.X. Tian, X.B. Yang, S.Q. Fu, Ricky K.Y. and Chu, Paul K. 2007. Particle-in-cell numerical simulation of non-uniform plasma immersion ion implantation. Surface and Coatings Technology, Vol. 201, Issue. 9-11, p. 5458.

Allen, J. E. and Annaratone, B. M. 2007. Comment on “A nonlinear global model of a dual frequency capacitive discharge” [Phys. Plasmas 13, 083501 (2006)]. Physics of Plasmas, Vol. 14, Issue. 1,

Heil, Brian G Brinkmann, Ralf Peter and Czarnetzki, Uwe 2008. A hybrid, one-dimensional model of capacitively coupled radio-frequency discharges. Journal of Physics D: Applied Physics, Vol. 41, Issue. 22, p. 225208.

Ziegler, Dennis Mussenbrock, Thomas and Brinkmann, Ralf Peter 2008. Nonlinear dynamics of dual frequency capacitive discharges: a global model matched to an experiment. Plasma Sources Science and Technology, Vol. 17, Issue. 4, p. 045011.

Ziegler, D. Mussenbrock, T. and Brinkmann, R. P. 2009. Temporal structure of electron heating in asymmetric single-frequency and dual-frequency capacitive discharges. Physics of Plasmas, Vol. 16, Issue. 2, p. 023503.

Article contents

On the theory of plasma–sheath resonance in a non-uniform plasma

Abstract

Save article to Kindle

Save article to Dropbox

Save article to Google Drive

Reply to: Submit a response

Your details

You have entered the maximum number of contributors

Conflicting interests